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coherent refractive microlens arrays  (Coherent Corp)


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    Coherent Corp coherent refractive microlens arrays
    Fig. 2. Scanning electron microscopy (SEM) images of a) overview of different microlenses milled into the glass substrate using P-FIB at 60 and 200 nA of Xe beam current and b) cross- section view revealing the profile of a 55-µm <t>microlens.</t> SEM stage tilt is 52°. c) Parabolic fit to the measured profile of the lens from (b).
    Coherent Refractive Microlens Arrays, supplied by Coherent Corp, used in various techniques. Bioz Stars score: 94/100, based on 6 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/coherent+refractive+microlens+arrays/MICRO+LENS+ARRAYS/10__1364_slash_oe__26__013647-19-9-9
    Average 94 stars, based on 6 article reviews
    coherent refractive microlens arrays - by Bioz Stars, 2026-11
    94/100 stars

    Images

    1) Product Images from "Fabrication of glass microlenses using focused Xe beam"

    Article Title: Fabrication of glass microlenses using focused Xe beam

    Journal: Optics Express

    doi: 10.1364/oe.26.013647

    Fig. 2. Scanning electron microscopy (SEM) images of a) overview of different microlenses milled into the glass substrate using P-FIB at 60 and 200 nA of Xe beam current and b) cross- section view revealing the profile of a 55-µm microlens. SEM stage tilt is 52°. c) Parabolic fit to the measured profile of the lens from (b).
    Figure Legend Snippet: Fig. 2. Scanning electron microscopy (SEM) images of a) overview of different microlenses milled into the glass substrate using P-FIB at 60 and 200 nA of Xe beam current and b) cross- section view revealing the profile of a 55-µm microlens. SEM stage tilt is 52°. c) Parabolic fit to the measured profile of the lens from (b).

    Techniques Used: Electron Microscopy

    Fig. 1. Pattern for milling microlens in glass with P-FIB is a) a parabolic profile where lateral pixels represent the position of the beam and the value of the pixels is proportional to the amount of material to be milled away. b) The patterns are 8-bit bitmap images. To reduce digitalization errors, the pattern is raster-scanned in three steps with each step the pattern rotated by 120°. The procedure is repeated until the desired mill depth is achieved.
    Figure Legend Snippet: Fig. 1. Pattern for milling microlens in glass with P-FIB is a) a parabolic profile where lateral pixels represent the position of the beam and the value of the pixels is proportional to the amount of material to be milled away. b) The patterns are 8-bit bitmap images. To reduce digitalization errors, the pattern is raster-scanned in three steps with each step the pattern rotated by 120°. The procedure is repeated until the desired mill depth is achieved.

    Techniques Used:

    Fig. 4. Focusing properties characterization of microlenses by mapping the intensity at different planes around the focus (a-c, a microlens with a sag height 7.3 µm) (d,e,f,g). Cross- sectional view through the focused beam for microlenses with 7.3 µm, 9 µm, 13.2 µm and 1.8 µm sag height, respectively. Some misalignments in the figures are due to the mechanical drift and vibrations. h) Comparison of intensity profiles at the focus of the microlenses with the corresponding Airy function fit.
    Figure Legend Snippet: Fig. 4. Focusing properties characterization of microlenses by mapping the intensity at different planes around the focus (a-c, a microlens with a sag height 7.3 µm) (d,e,f,g). Cross- sectional view through the focused beam for microlenses with 7.3 µm, 9 µm, 13.2 µm and 1.8 µm sag height, respectively. Some misalignments in the figures are due to the mechanical drift and vibrations. h) Comparison of intensity profiles at the focus of the microlenses with the corresponding Airy function fit.

    Techniques Used: Comparison

    Related Articles

    Electron Microscopy:

    Article Title: Fabrication of glass microlenses using focused Xe beam
    Article Snippet: M. B. Stern and T. R. Jay, “Dry-Etching for Coherent Refractive Microlens Arrays,” J Opt a-Pure Appl Op 8, S407– S429 (1994).

    Comparison:

    Article Title: Fabrication of glass microlenses using focused Xe beam
    Article Snippet: M. B. Stern and T. R. Jay, “Dry-Etching for Coherent Refractive Microlens Arrays,” J Opt a-Pure Appl Op 8, S407– S429 (1994).



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    94
    Coherent Corp coherent refractive microlens arrays
    Fig. 2. Scanning electron microscopy (SEM) images of a) overview of different microlenses milled into the glass substrate using P-FIB at 60 and 200 nA of Xe beam current and b) cross- section view revealing the profile of a 55-µm <t>microlens.</t> SEM stage tilt is 52°. c) Parabolic fit to the measured profile of the lens from (b).
    Coherent Refractive Microlens Arrays, supplied by Coherent Corp, used in various techniques. Bioz Stars score: 94/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/coherent+refractive+microlens+arrays/MICRO+LENS+ARRAYS/10__1364_slash_oe__26__013647-19-9-9
    Average 94 stars, based on 1 article reviews
    coherent refractive microlens arrays - by Bioz Stars, 2026-11
    94/100 stars
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    Fig. 2. Scanning electron microscopy (SEM) images of a) overview of different microlenses milled into the glass substrate using P-FIB at 60 and 200 nA of Xe beam current and b) cross- section view revealing the profile of a 55-µm microlens. SEM stage tilt is 52°. c) Parabolic fit to the measured profile of the lens from (b).

    Journal: Optics Express

    Article Title: Fabrication of glass microlenses using focused Xe beam

    doi: 10.1364/oe.26.013647

    Figure Lengend Snippet: Fig. 2. Scanning electron microscopy (SEM) images of a) overview of different microlenses milled into the glass substrate using P-FIB at 60 and 200 nA of Xe beam current and b) cross- section view revealing the profile of a 55-µm microlens. SEM stage tilt is 52°. c) Parabolic fit to the measured profile of the lens from (b).

    Article Snippet: M. B. Stern and T. R. Jay, “Dry-Etching for Coherent Refractive Microlens Arrays,” J Opt a-Pure Appl Op 8, S407– S429 (1994).

    Techniques: Electron Microscopy

    Fig. 1. Pattern for milling microlens in glass with P-FIB is a) a parabolic profile where lateral pixels represent the position of the beam and the value of the pixels is proportional to the amount of material to be milled away. b) The patterns are 8-bit bitmap images. To reduce digitalization errors, the pattern is raster-scanned in three steps with each step the pattern rotated by 120°. The procedure is repeated until the desired mill depth is achieved.

    Journal: Optics Express

    Article Title: Fabrication of glass microlenses using focused Xe beam

    doi: 10.1364/oe.26.013647

    Figure Lengend Snippet: Fig. 1. Pattern for milling microlens in glass with P-FIB is a) a parabolic profile where lateral pixels represent the position of the beam and the value of the pixels is proportional to the amount of material to be milled away. b) The patterns are 8-bit bitmap images. To reduce digitalization errors, the pattern is raster-scanned in three steps with each step the pattern rotated by 120°. The procedure is repeated until the desired mill depth is achieved.

    Article Snippet: M. B. Stern and T. R. Jay, “Dry-Etching for Coherent Refractive Microlens Arrays,” J Opt a-Pure Appl Op 8, S407– S429 (1994).

    Techniques:

    Fig. 4. Focusing properties characterization of microlenses by mapping the intensity at different planes around the focus (a-c, a microlens with a sag height 7.3 µm) (d,e,f,g). Cross- sectional view through the focused beam for microlenses with 7.3 µm, 9 µm, 13.2 µm and 1.8 µm sag height, respectively. Some misalignments in the figures are due to the mechanical drift and vibrations. h) Comparison of intensity profiles at the focus of the microlenses with the corresponding Airy function fit.

    Journal: Optics Express

    Article Title: Fabrication of glass microlenses using focused Xe beam

    doi: 10.1364/oe.26.013647

    Figure Lengend Snippet: Fig. 4. Focusing properties characterization of microlenses by mapping the intensity at different planes around the focus (a-c, a microlens with a sag height 7.3 µm) (d,e,f,g). Cross- sectional view through the focused beam for microlenses with 7.3 µm, 9 µm, 13.2 µm and 1.8 µm sag height, respectively. Some misalignments in the figures are due to the mechanical drift and vibrations. h) Comparison of intensity profiles at the focus of the microlenses with the corresponding Airy function fit.

    Article Snippet: M. B. Stern and T. R. Jay, “Dry-Etching for Coherent Refractive Microlens Arrays,” J Opt a-Pure Appl Op 8, S407– S429 (1994).

    Techniques: Comparison